Wafer mapping

ASW-SG Series

  • To detect Silicon Carbide, Sapphire, Silicon and other translucent wafers.
  • Applicable to 6, 8 and 12 inch wafers
  • Translucent wafer mode (8 and 12 inch models)
  • Free from Electrostatic effects (comb sensor unit)
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ASW-SG Series

Model Detection method Applicable Wafer Number of channels Wafer pitch Power supply  
ASW-SG85F Through beam 8 inches 25 6.35mm 24V DC
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ASW-SG125VF Through beam 12 inches 25 10.0mm 12 - 24V DC
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More Info

The wafer mapping sensor speeds up the sensing process while maintaining reliable detection.

ASW-SG625AP

The dimension shown in these drawing apply to the bottom end (※2), not the protrusion end (※1) of the comb.

ASW-SG85F
ASW-SG85F-Y05
ASW-SG86F
ASW-SG86F-Y05

The dimension shown in these drawing apply to the bottom end (※2), not the protrusion end(※1) of the comb.

ASW-SG125VF

The dimension shown in these drawing apply to the bottom end (※2), not the protrusion end (※1) of the comb.

Comb sensor unit
ASW-F2500

Comb sensor unit
ASW-F1600

ASW-SG625AP
ASW-SG85F
ASW-SG86F
ASW-SG85F-Y05
ASW-SG86F-Y05

ASW-SG125VF

(For a noise prevention, a capacitor is installed between the 0V power supply and the sensor’s aluminum case.
Do not conduct withstand voltage Test between any input / output and the sensor case. )

External wiring and connector number