INDUSTRIAL SENSORS
Sensors for Wafer Detection
A sensor specifically designed for wafer mapping, capable of detecting silicon carbide, sapphire, silicon, and other translucent wafers. The comb sensor unit is also replaceable, allowing for more efficient maintenance and lower operating costs.
Products
Application
Collective Detection of Wafers
Presence of wafers in cassette collectively checked for mapping.
Detection of Translucent Wafers
Simultaneously detects all the translucent wafers etc in cassette by latch mode. Through beam method is adopted for reliable detection.
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